Integrated high performance system comprises of Confocal Microscope and Scanning Electron Microscope enabling seamless specimen observation from nanometer through millimeter range.

Measurement with optimum wavelength most suited to each sample is realized by selectivity among 5 illumination wavelengths, ranges from violet to red.  The new illumination technology allows bright, beautiful and high-resolution multi-layered structures to be capture with ease and accuracy.

A 5 wavelength (color) confocal microscope integrated with interferometric measurements through Mirau interference enabling high contrast images surface roughness to be acquired with Angstrom unit accuracy.

A new confocal microscope with high image quality and excellent color separation implemented by using prismatic RGB light with corresponding 3-CCD image sensors consisting of 4 million pixels each.

Employment of Xenon Lamp white light, with spectral close to that of the sunlight, enables high resolution and high magnification confocal images that reproduces real color (in RGB) of the sample in three dimensions.