STAr Capricorn MS – Multi-Die Probe Station fulfills the requirements to support multi-sites parallel reliability tests. System can support 16 sites, each with one micro-stages having XYZθ axes maneuverability and with up to 25 probes for 300mm wafer. Capricorn MS are available for either manual or semi-automatic probe station with chuck temperature up to a maximum of 300 degC.

STAr Capricorn MP – Multi-Die Probe Positioner is a 6-axes (XYZ-aβθ) positioner that can hold a probe card of up to 26 probe pins for use with standard parametric tests or high temperature realiability tests. The Capricorn-MP enables easy probe card placement and alignment irrespective of the types of probe stations and can even allow up to 8 units to be placed on a single probe station for parallel multi-site probing and testing.